| 000 | 00481nam a2200157Ia 4500 | ||
|---|---|---|---|
| 005 | 20260205064226.0 | ||
| 008 | 260111s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a9780521764834 | ||
| 082 | _a621.381 J71E | ||
| 100 | _aJones, Thomas B. | ||
| 245 | 0 | _aElectromechanics and MEMS | |
| 260 |
_aDelhi _bCambridge uni.press _c2016 |
||
| 300 | _a559p. | ||
| 690 | _aTechnology and engineering ;Electronics ;Optoelectronics ;microelectronics ;Electromechnical systems | ||
| 942 | _cBK | ||
| 999 |
_c199306 _d199306 |
||