000 00481nam a2200157Ia 4500
005 20260205064226.0
008 260111s9999||||xx |||||||||||||| ||und||
020 _a9780521764834
082 _a621.381 J71E
100 _aJones, Thomas B.
245 0 _aElectromechanics and MEMS
260 _aDelhi
_bCambridge uni.press
_c2016
300 _a559p.
690 _aTechnology and engineering ;Electronics ;Optoelectronics ;microelectronics ;Electromechnical systems
942 _cBK
999 _c199306
_d199306