000			00362nam a2200145Ia 4500
005			20260205052535.0
008			260111s9999||||xx |||||||||||||| ||und||
082			_a533.5 R18V
100			_arao,v v
245		0	_avacuum science and technology
260			_an.d. _ballied _c1998
300			_a202
690			_aVACUUM SCIENCE;GHOSH,T B;CHOPRA, K
942			_cBK
999			_c116807 _d116807