00481nam a2200157Ia 4500 20260205064226.0 260111s9999||||xx |||||||||||||| ||und|| 9780521764834 621.381 J71E Jones, Thomas B. Electromechanics and MEMS Delhi Cambridge uni.press 2016 559p. Technology and engineering ;Electronics ;Optoelectronics ;microelectronics ;Electromechnical systems BK 199306 199306 0 0 0 0 TSCSL TSCSL 2026-02-05 0 621.381 J71E 240811 2026-02-05 06:42:26 2026-02-05 BK